Year 2014

25MW Cell production line Ex demonstration

€1.2 million

Installation and training available

Inc 1 year warranty

Ref 251189
   
 

Equipment technical parameters

Texturing and Cell Cleaning

Sizes:-

125 * 125 * 0.20 mm

135 * 135 * 0.20 mm

156 * 156 * 0.20 mm

10 min/basket

Loading capacity of 300 / cleaning basket basket (125 * 125 * 0.20 mm)

Cleaning basket dimensiona L600 * H378 W670

Mechanical arm bearing max 40 kg

 

Cabinet, Purification console, Furnace cabinet

5 segment furnace & temperature control system

Furnace effective internal diameter: 350mm (adapted quartz tube diameter 330mm)

Temperature control range: 400 ~ 1100 °C

Effective loading capacity: 400 / tube

Thermostatic zone length and accuracy: ± 1 °C / 1080mm (801 ~ 1100 )

± 1.5 / 1080mm (400 ~ 800 °C)

Single Point Temperature Stability: ± 1 °C / 4h (at 880°C);

Temperature ramping capability:

Heating rate: ≥15 °C / min

Maximum cooling rate: 5 °C / min;

Thermostatic cooling function;

Rapid return temperature furnace tube systems

Fully automatic calibrated temperature zone.

Furnace pressure self-balancing system;

Tail centralized collection, directional emission; Exhaust

Over-temperature cut out etc

Touch screen, computer controller automatic process controlled by industrial computer

Uses BV100 bath temperature control.

Mass flow control accuracy: ≥ ± 1% FS;

Machine Uptime 95%

Total power: Peak ≥150 KVA (3 tubes), holding power approx. 75KVA (3tubes).

5 segment furnace temperature control system

 

Etching : doped silicon nitride

Etched parts: 5 ", 6" square piece

Loading capacity: 800 / batch

Plasma source: Inductively coupled plasma source (ICP source), power1kW, frequency 13.56MHz

Gas system: two-way mass flowmeter

Process gas: CF4 / O2

Vacuum: dry vacuum

Ultimate vacuum: better 3Pa

Working vacuum: 13 ~ 39Pa (determined by the specific process), set the automatic control

Control system: TFT panel + PLC control

 

Cleaner

Wafer Size:-

125 × 125 × 0.20mm

135 × 135 × 0.20mm

156 × 156 × 0.20mm

Cleaning 10min / basket

Cleaning basket load of 300 / baskets (125 × 125 × 0.20mm)

Cleaning basket Dimensions L600 × W670 × H378

Maximum load 40Kg

 

PECVD

Silicon nitride

Size 156 × 156mm2 square pieces, 125 × 125mm2 square piece

Loading capacity:-

156 × 156mm2 square pieces 144 / batch

125 × 125mm2 square pieces 196 / batch

Deposition uniformity ± 4%

Index: 1.98-2.1

Film thickness: 800Å

Temperature 150-500 °C

6 thermostatic zone length and accuracy of ± 2°C / 1200mm (400 ?)

Temperature zone stability 400 °C <± 3 ? / 4H

Heating time RT - 400 °C ≤ 25min

9 5Pa ultimate vacuum system

The Working pressure range 50Pa-300Pa

Pressure Control closed loop automatic control

Vacuum recovery time AP - 10Pa <10min

A system leak rate after stopping the pump off valve pressure rise rate <3 Pa / min

Control computer control process, color character display process parameters

Number and process, and fault diagnosis, alarm and protection functions.

 

Silk Screen Printing

Accuracy and repeatability: 2CPK @ ± 12.5 microns

Capacity: 1200 / hour

Wafer Size: 125mm × 125mm 156mm × 156mm

wafer thickness: 120 microns to 1 mm

print pressure control system: adaptive pressure balance mechanism and

closed-loop control software

stencil area: MAX 200mm × 200mm

stencil Correction: motorized adjustment

Visual positioning system: 4CCD camera and industrial cameras, automatically

Wafer edge and stencil benchmark calibration

Control System: High-speed Ethercat bus controller, offers a variety of communication interfaces

Color touch screen, keyboard & trackball mouse

Breakage rate: ≤3 ‰

 

High Temperature Sintering Furnace

Main features

Maximum temperature: 950°C

Dimensions (mm) Dimensions: 11700 (L) X 1240 (W) X 1480 (± 30) (H)

Heating chamber dimensions: 6700 (L) X 350 (W) X 180 (H)

Cooling area size: 3000 (L) X 550 (W) X 320 (H)

Guide table size: 800 (L) X 1240 (W) X 880 (± 30) (H)

Air shower curtain on input and output

Directional infrared radiation heating lamps

Full technical spec available

 

 

Cell Sorter

Cell Size: 125mm × 125mm, 156mm × 156mm - cell thickness: 180-330?m

Production Efficiency:> 1400 / hour

Breakage rate: <2 ‰

Fully Automatic

Light source: high-intensity xenon lamp, 200W ~ 1000W continuously adjustable (Endeas simulator)

500W and 1000W (Berger simulator)

Spectrum rating: Class A AM1.5

Repeatability: <± 0.25% (static)

Each batch of data is automatically saved as an Excel document

Power: AC220V / 20A

Gas source: air 0.4-0.7MPa 300l / Min